Digital micromirror device having a window transparent to...

Optical: systems and elements – Having significant infrared or ultraviolet property – Having ultraviolet absorbing or shielding property

Reexamination Certificate

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C359S350000, C359S355000

Reexamination Certificate

active

06859311

ABSTRACT:
A UV-transmissable window assembly for a DMD device includes a UV-transmissable glass window provided in a frame. The window and frame are bonded together to preferably effect a hermetic seal therebetween. Optical coatings specific to the intended wavelength of light transmission are applied to the inner and outer surfaces of the glass window to reduce reflection and increase light transmission therethrough. The window assembly, and DMD provided with the same, is adapted for excellent transmission of ultraviolet light, even at the deep ultraviolet portion of the spectrum. The DMD window assembly has application in the medical arts, both surgery and device manufacture, in the production of integrated circuits (IC), and in other optical lithography applications, among other fields.

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patent: 6107641 (2000-08-01), Mei et al.
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patent: 6394999 (2002-05-01), Williams et al.
patent: 6413251 (2002-07-01), Williams
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“Objective Measurement of Wave Aberrations of the Human Eye with the Use of a Hartmann-Shack Wave-front Sensor” by Junzhong Liang, et al., Optical Society of America, vol. 11, No. 7, Jul. 1994.
“Digital Light Processing™ for High-Brightness, High-Resolution Applications” by Larry Hornbeck, Texas Instruments, Electronic Imaging, San Jose, California, El '97, Projection 2, vol. 11, No. 7, Jul. 1994.
“Advanced Materials for Optoelectronic Packaging” by Carl Zweben, Advanced Theramal Materials Cosnultant, Devon, Penn, Sep. 1, 2002, downloaded from web Site www.e-insite.net.
“Hermetic Lids for Electronic Packaging”, Williams Advanced Materials 2002, downloaded from web site www.williams-adv.com.
“Visi-Lid ™Hermetic Window Assemblies” by Micahel Zasowski, Williams Advanced Materials 2002, downloaded from web site www.williams-adv.com.

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