Digital micromirror device and manufacturing method thereof

Details Digital micromirror device and manufacturing method thereof Digital micromirror device and manufacturing method thereof

2006-09-08

2008-09-16

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S291000, C359S223100, C359S226200, C359S872000

Reexamination Certificate

active

07426073

ABSTRACT:
Provided is a digital micromirror device (DMD). The DMD includes a first metal line, a second metal line, a third metal line, and a mirror. The first metal line is formed to have a predetermined line width and a predetermined thickness, and the second metal line is formed to have the same width and thickness as the first metal line. The third metal line is formed to have its own predetermined line width and predetermined thickness, and the mirror rotates according to a voltage applied to the first, second and third metal lines to reflect light incident thereto.

REFERENCES:
patent: 5926309 (1999-07-01), Little
patent: 6825968 (2004-11-01), Aubuchon
patent: 7145711 (2006-12-01), Aubuchon

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