Digital controller for inchworm piezoelectric translator

Details Digital controller for inchworm piezoelectric translator Digital controller for inchworm piezoelectric translator

1992-09-29

1993-12-07

Budd, Mark O.

Electricity: motive power systems

Nonmagnetic motor

310317, 310328, H01L 4108

Patent

active

052686213

ABSTRACT:
A controller for an inchworm type linear transducer is constructed so as to be extremely low noise and to permit very fine positioning. This is done by storing the desired output waveforms in digital form in an EEPROM memory array and then counting through the address locations of the memory array to re-create the desired waveform. An analog amplifier is used to actually drive the piezoelectric elements in the transducer.

REFERENCES:
patent: 3902084 (1975-08-01), May, Jr.
patent: 5027027 (1991-06-01), Orbach et al.
Burleigh Instruments Inc. schematic (no date).
Jeon and Willis, "Inchworm Controller for Fine Approach in a Scanning Tunneling Microscope," Journal of Vacuum Science Technology, vol. 9, No. 4 (Jul./Aug. 1991).

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