Digital capacitive accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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G01P 15125

Patent

active

053536410

ABSTRACT:
A digital capacitive accelerometer is disclosed as having a fixed plate mounted on a support member and a sprung plate resiliently mounted in spaced relationship to the fixed plate to form a capacitor. A voltage is connected across the plates to establish an electrostatic force that pulls the sprung plate toward the fixed plate. The voltage is incrementally increased, pulling the sprung plate incrementally toward the fixed plate. When a pull-in voltage level is reached, the electrostatic force is of sufficient magnitude to abruptly pull the sprung plate across the remaining distance separating it from the fixed plate, and a pull-in detection signal is generated by detecting a current pulse as the gap collapses. The plates are then released, and another incrementing cycle is initiated. The pull-in voltage is a function of the initial capacitor gap which in turn is determined by the acceleration the device is experiencing. Since detection of the current pulse is easy, the accelerometer is therefore substantially more sensitive than inertial types of accelerometers, and a generated signal representative of the number of times the voltage is increased is also representative of the acceleration force applied.

REFERENCES:
patent: 3911738 (1975-10-01), Fischer
patent: 4553436 (1985-11-01), Hansson
patent: 4641539 (1987-02-01), Vilimek
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5243861 (1993-09-01), Kloeck et al.
"The Resonant Gate Transistor", IEEE Trans. Electron Devices, vol. Ed-14, pp. 117-133, 1967, Nathanson et al.

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