Difraction grating having enhanced blaze performance at two wave

Details Difraction grating having enhanced blaze performance at two wave Difraction grating having enhanced blaze performance at two wave

1998-12-23

2000-05-23

Spyrou, Cassandra

Optical: systems and elements

Diffraction

From grating

359569, 359572, 359900, 372102, G02B 518, H01S 308

Patent

active

060671971

ABSTRACT:
An echelle grating having a groove facet angle and groove periodicity such that for laser-emitted light of two different wavelengths the highest propagating diffraction order is blazed and the next higher order is non-propagating such that the intensity of each blazed order is enhanced. In an example, the 84th diffraction order of a KrF excimer laser emitting at 248.4 nm and the 108th diffraction order of an ArF excimer laser emitting at 193.3 nm will both be blazed when the groove spacing d is 0.010623 mm, corresponding to a frequency f of 94.13 grooves per mm, and the groove facet angle .theta..sub.g is about 80.degree., whereas the next higher order for each laser, i.e., the 85th and 109th orders, respectively, are non-propagating, and thus both blaze orders are enhanced.

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