Diffusion pump with two inlets and two stage pumping capability

Details Diffusion pump with two inlets and two stage pumping capability Diffusion pump with two inlets and two stage pumping capability

1997-02-13

1999-06-22

Thorpe, Timothy S.

Pumps

One fluid pumped by contact or entrainment with another

Jet

F04B 912

Patent

active

059136626

ABSTRACT:
A diffusion pump for evacuating a chamber is provided with a hollow outer body including an outlet for connection to a backing pump and a base for containing a working fluid. A vapor chimney extends from the base within the hollow outer body and includes at least two spaced apart jet stages. The working fluid is heated when present in said base. Two or more inlets are formed in the hollow outer body for communicating with said at least one chamber to be evacuated. The presence of the two inlets provides the possibility of differential pumping.

REFERENCES:
patent: 2997956 (1961-08-01), Stewart
patent: 3302864 (1967-02-01), Nicolas
patent: 4147478 (1979-04-01), Vork
patent: 5137429 (1992-08-01), Broadhurst

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