Diffusion isolation layer for maskless cladding process

Details Diffusion isolation layer for maskless cladding process Diffusion isolation layer for maskless cladding process

1984-10-30

1986-04-15

Hoffman, James R.

Coating processes

Electrical product produced

Welding electrode

427 96, 427 99, 427123, 427124, 427125, 427154, 427156, 204192C, 204192N, B05D 312, B05D 512, C23C 1400

Patent

active

045827222

ABSTRACT:
Disclosed is a maskless metal cladding process for plating an existing metallurgical pattern by utilizing a protective layer to isolate those areas of underlying metallurgy on which additional metal plating is not desired. The layer acts as an isolation barrier to protect the underlying metallurgy from deposition and subsequent diffusion of the heavy metal (e.g., gold) overlay. The composition of the protective layer is selected as one having sufficient mechanical integrity to withstand process handling and support the gold overlay and having the thermal integrity to withstand the high temperatures reached during metal sputtering and diffusion processes. The isolation barrier layer has an organic component as a binder which thermally decomposes, either in a heating step before metal deposition or during the diffusion cycle, leaving no carbonaceous residue but leaving an inert, inorganic standoff to support the metal. After diffusion of the metal, the remaining inorganic standoff layer, overlying metal and any undiffused metal remaining on the non-patterned substrate is easily removed by a standard technique, such as ultrasonics.

REFERENCES:
patent: 2788289 (1957-04-01), Double
patent: 3518756 (1970-07-01), Bennett
patent: 3741735 (1973-06-01), Buttle
patent: 3957552 (1976-05-01), Ahn
patent: 4293587 (1981-10-01), Trueblood
patent: 4442137 (1984-04-01), Kumar
patent: 4493856 (1985-01-01), Kumar et al.
patent: 4526859 (1985-07-01), Christensen
IBM Technical Disclosure Bulletin, vol. 22, No. 4, Sep. 1979, p. 1439 "Electroplating of MLC Substrates Using a Nonprecious metal Shorting Material", Kowalczyk.

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