Diffusion furnace system for preventing gas leakage

Details Diffusion furnace system for preventing gas leakage Diffusion furnace system for preventing gas leakage

1997-05-20

1999-03-16

Hoang, Tu Ba

Industrial electric heating furnaces

Resistance furnace device

With internal atmosphere control

373 5, 373 8, 219390, 432239, 266257, F27D 706

Patent

active

058839194

ABSTRACT:
A furnace system for preventing gas leakage is disclosed. The furnace system includes a bottom board for holding a furnace tube. A gas injection device is connected to the furnace tube at a first port for injecting reaction gas into the furnace tube. An exhaust subsystem is connected to the furnace tube at a second port. The exhaust subsystem has a first node, a second node, a third node and a fourth node. A vacuum seal is connected to the furnace tube at a third port for preventing the exhaust gas from leaking. The vacuum seal is connected to the exhaust subsystem at the first node and the second node. Finally, an N.sub.2 sealing tube is connected to furnace tube and surrounding the seam between the furnace tube and the bottom board.

REFERENCES:
patent: 5447294 (1995-09-01), Sakata et al.

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