Diffusion furnace multizone temperature control

Details Diffusion furnace multizone temperature control Diffusion furnace multizone temperature control

1986-05-19

1987-12-08

Goldberg, E. A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219388, 219494, 219411, 118725, 118 501, H05B 364

Patent

active

047119896

ABSTRACT:
There is a substantial heat loss and drop in temperature in a hot-wall diffusion tube when a batch of wafers at room temperature is loaded into the tube. The temperature of the atmosphere in a zone in the tube is quickly recovered by sensing both the temperature of the tube atmosphere and the temperature of a heating element surrounding the zone with thermocouples, mixing the signals of the thermocouples to produce a ratio average signal and then controlling the heat input to the heating elements in response to the ratio average of the sensed temperature.

REFERENCES:
patent: 2391195 (1945-12-01), Ross
patent: 2422734 (1947-06-01), Jung
patent: 2843714 (1958-07-01), Stanton
patent: 3385921 (1968-05-01), Hampton
patent: 4243441 (1981-01-01), Wilson
patent: 4348580 (1982-09-01), Drexel

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