Diffusion furnace microcontroller

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219486, 219497, 236 15BC, 236 78B, 364120, 364107, 364557, 432 36, G06F 1546, G05B 2330

Patent

active

042766036

ABSTRACT:
An automatic microprocessor-based control system for a diffusion furnace in which the controller is dedicated to a single associated diffusion tube to provide all monitoring and control functions necessary for a variety of diffusion processes. The controller provides direct digital control of time, temperature and gas flow, and can be readily operated with a variety of control algorithms.

REFERENCES:
patent: 3315063 (1967-04-01), Ihlenfeldt
patent: 3319887 (1967-05-01), Gallagher
patent: 3370120 (1968-02-01), Lasch, Jr.
patent: 3387078 (1968-06-01), Montgomery, Jr. et al.
patent: 3723053 (1973-03-01), Myers et al.
patent: 4004138 (1977-01-01), Morooka et al.
patent: 4011430 (1977-03-01), Witkin et al.

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