Optical: systems and elements – Optical modulator
Reexamination Certificate
2009-11-06
2011-12-27
Choi, William (Department: 2873)
Optical: systems and elements
Optical modulator
C359S290000, C438S653000
Reexamination Certificate
active
08085458
ABSTRACT:
Described herein is the use of a diffusion barrier layer between metallic layers in MEMS devices. The diffusion barrier layer prevents mixing of the two metals, which can alter desired physical characteristics and complicate processing. In one example, the diffusion barrier layer may be used as part of a movable reflective structure in interferometric modulators.
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Lin et
Tung Ming-Hau
Wang Hsin-Fu
Zee Stephen
Choi William
Knobbe Martens Olson & Bear LLP
QUALCOMM MEMS Technologies Inc.
Tra Tuyen
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