Optical: systems and elements – Optical modulator
Reexamination Certificate
2005-10-28
2009-12-08
Sugarman, Scott J (Department: 2873)
Optical: systems and elements
Optical modulator
Reexamination Certificate
active
07630114
ABSTRACT:
Described herein is the use of a diffusion barrier layer between metallic layers in MEMS devices. The diffusion barrier layer prevents mixing of the two metals, which can alter desired physical characteristics and complicate processing. In one example, the diffusion barrier layer may be used as part of a movable reflective structure in interferometric modulators.
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Tung Ming-Hau
Wang Hsin-Fu
Zee Stephen
IDC LLC
Knobbe Martens Olson & Bear LLP
Sugarman Scott J
Tra Tuyen Q
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