Electric lamp and discharge devices – With luminescent solid or liquid material – Solid-state type
Reexamination Certificate
2005-02-18
2009-02-17
Patel, Ashok (Department: 2889)
Electric lamp and discharge devices
With luminescent solid or liquid material
Solid-state type
C313S506000, C313S512000, C428S917000, C428S472000, C428S472200, C428S689000, C428S693100
Reexamination Certificate
active
07492091
ABSTRACT:
A diffusion barrier system for a display device comprising a layer system with at least two layers of dielectric material, wherein at least two adjacent layers of that layer system comprise the same material. A respective method for manufacturing such a diffusion barrier system in a single process chamber of a plasma deposition system has the steps of introducing a substrate to be treated in said process chamber, discretely varying in a controlled manner during deposition at least one process parameter in the process chamber, without completely interrupting such process parameter, which results in layers with different properties and finally unloading said substrate from said process.
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Gallissian Alice
Kharrazi-Olsson Maryam
Quoc Hai Tran
OC Oerlikon Balzers AG
Patel Ashok
Pearne & Gordon LLP
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