Diffuser unit, lithographic apparatus, method for...

Details Diffuser unit, lithographic apparatus, method for... Diffuser unit, lithographic apparatus, method for...

2007-08-21

2007-08-21

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S067000, C355S071000

Reexamination Certificate

active

10890401

ABSTRACT:
A lithographic apparatus is provided with a diffuser unit including a fluid that includes diffuser particles that are able to diffuse rays in a beam of radiation used to illuminate an object, for example a mask or a wafer. The diffuser particles may be solid particles or gas bubbles in a liquid. The fluid and the diffuser particles may be moved, for example perpendicularly to the beam of radiation, or perpendicularly to a scanning direction of the beam of radiation in a scanning lithographic apparatus, in order to improve the diffusion action. As the radiation to illuminate is diffused and homogenized, subsequent illumination is improved. The apparatus may be used to manufacture CCD's and the like, since when viewed by the human eye they show a homogeneity preferably better than 0.02%.

REFERENCES:
patent: 5251070 (1993-10-01), Hashimoto et al.
patent: 6154259 (2000-11-01), Hargis et al.
patent: 2005/0185155 (2005-08-01), Kishikawa
patent: 2005/0237512 (2005-10-01), Smith et al.
patent: 2003383732 (2003-11-01), None

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