Diffuser features for spin-coated films

Details Diffuser features for spin-coated films Diffuser features for spin-coated films

1990-02-12

1990-11-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437229, 430320, 430935, 430311, H01L 21027

Patent

active

049719319

ABSTRACT:
In forming integrated circuits on a wafer, diffuser features are provided adjacent to topographic features so that when a film is formed by spin-coating a liquid precursor over the integrated circuits, the action of the spreading liquid relative to the diffuser features in proximity to topographic features minimizes radial streaks which would have been caused by the topographic features.

REFERENCES:
patent: 4069076 (1978-01-01), Fickes
patent: 4103064 (1978-01-01), McAlear et al.
patent: 4267212 (1981-05-01), Sokawaki
patent: 4315985 (1982-02-01), Castellani et al.
patent: 4738910 (1988-04-01), Ito et al.
patent: 4767695 (1988-08-01), Ong et al.

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