Diffused semiconductor pressure gauge

Details Diffused semiconductor pressure gauge Diffused semiconductor pressure gauge

1976-05-17

1978-01-03

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, 338 42, G01L 906

Patent

active

040659704

ABSTRACT:
A diaphragm for a miniature pressure transducer has its surface sculptured by anisotropic etching to provide gauge areas in the form of narrow thin flexure areas between thick areas in the form of islands or motes. The thick areas act to constrain or stiffen the flexure areas from bending along their lengths while facilitating the bending thereof about axes parallel to their lengths when the diaphragm deflects in response to a pressure change. Linear piezoresistive gauges diffused into the gauge areas are responsive to the bending of said flexure areas to change resistance by an amount corresponding to the pressure change.

REFERENCES:
patent: 3341794 (1967-09-01), Stedman
patent: 3520191 (1970-07-01), Pien
patent: 3697918 (1972-10-01), Orth et al.

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