Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1992-07-13
1993-12-21
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
356432, G01N 2149, G01N 2159
Patent
active
052723429
ABSTRACT:
There is disclosed a diffused layer depth measurement apparatus equipment which has a sample table for supporting a sample cut from a measured semiconductor substrate including a high concentration impurity diffused layer on one surface side and a surface-polished low concentration diffused layer on the opposite surface side in such a manner that the one surface side of the sample is mounted on the sample table, an infrared ray generator, an infrared ray scanner for allowing infrared rays generated by the infrared ray generator to be incident from the side surface of the sample in parallel to the sample surface and for scanning the infrared ray irradiation position in a thickness direction of the sample, a transmitted light measurement unit for measuring the intensity of infrared rays transmitted through the sample, and a diffused layer depth calculation unit for calculating a ratio of a transmitted light intensity measured by the transmitted light measurement means to an incident light intensity to calculate a diffusion depth of the high concentration impurity diffused layer from the relationship between a change point of said ratio and the scanning position. A scattered light measurement unit may be used to calculate a diffusion depth of the high concentration impurity diffused layer from a change point of a scattered light intensity.
REFERENCES:
patent: 5125740 (1992-06-01), Sato et al.
M. Gal, K. Nemeth and G. Eppeldauer, "Method and spectrometer for measuring optical absorption in thin epitaxial layers." Journal of Physics E, vol. 9, No. 6, (Jun. 1976) pp. 484-487.
V. T. Prokopenko and A. D. Yas'kov, "An infrared introscope with a CO.sub.2 laser for the investigation of microinhomogeneities of the structure of semiconductors." Translated from Pribory i Tekhnika Eksperimenta, No. 3 (May-Jun. 1974) pp. 215-216.
Hannaher Constantine
Kabushiki Kaisha Toshiba
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