Diffuse surface interference position sensor

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen

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73655, 356356, G01B 1116

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active

057837520

ABSTRACT:
Position of a diffusely scattering surface is detected by interfering backscattered light from respective input beams which illuminate a common spot. Through polarization of the input beams and appropriate filtering, backscattered light is isolated from specularly reflected light and interfered to form a fringe pattern on a detector. The position sensor has particular applicability as a push pin sensor in a hard disk servo system.

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