Diffractive thin-film piezoelectric micromirror and method...

Details Diffractive thin-film piezoelectric micromirror and method... Diffractive thin-film piezoelectric micromirror and method...

2007-04-24

2007-04-24

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S230000, C359S579000, C359S584000

Reexamination Certificate

active

10938133

ABSTRACT:
Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.

REFERENCES:
patent: 6329738 (2001-12-01), Hung et al.
patent: 6917352 (2005-07-01), Makino
patent: 2004/0252936 (2004-12-01), Despont et al.

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