Diffractive thin-film piezoelectric light modulator and...

Details Diffractive thin-film piezoelectric light modulator and... Diffractive thin-film piezoelectric light modulator and...

2005-04-22

2008-10-28

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S331000, C359S291000

Reexamination Certificate

active

07443076

ABSTRACT:
Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when etching, thus increasing the surface smoothness of the lower support and of a micro-mirror. In addition, a method of fabricating the diffractive thin-film piezoelectric light modulator is also provided.

REFERENCES:
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patent: 7013072 (2006-03-01), Kinoshita
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