Diffractive optical system

Optical: systems and elements – Diffraction – From zone plate

Reexamination Certificate

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C359S566000, C359S569000

Reexamination Certificate

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07085055

ABSTRACT:
The invention relates to a diffractive optical system having a two-dimensional structure, which can be used as a phase shift mask for the fabrication of an optical element having a two-dimensional fine periodic structure, and a two-dimensional light beam splitter. The diffractive optical system10comprises a transparent substrate surface1that is divided in alignment with orthogonal two directions into minuscule square cell groups2, 3of the same shape in a checked pattern. The square cells that give a phase 2pπ and a phase {(2q+1)π±δπ} where 0≦δ≦0.25 and p and q are each an integer with respect to reference-wavelength light striking vertically on the transparent substrate surface1are alternately arranged in each direction, and the phase 2pπ-giving square cells and the phase {(2q+1)π±δπ}-giving square cells are located in such a way as to be in alignment with 45° diagonal directions of said two directions.

REFERENCES:
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 6577403 (2003-06-01), Primot et al.
patent: 2002/0135847 (2002-09-01), Nagasaka et al.

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