Diffractive optical element, illumination system comprising...

Details Diffractive optical element, illumination system comprising... Diffractive optical element, illumination system comprising...

2007-05-08

2007-05-08

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S569000, C359S571000, C355S067000

Reexamination Certificate

active

10874786

ABSTRACT:
An illumination system including a diffractive optical element (DOE) having an uneven surface that produces an illumination shape. The DOE comprising an uneven surface that produces a multipole illumination shape having angular scope element, wherein the angular scope element is a function of a radius and an angle of the produced multipole illumination shape, and wherein a position of the poles and sizes of the poles in an angular scope vary with a radial scope used in producing the multipole illumination shape, and a method of manufacturing a semiconductor device using the system.

REFERENCES:
patent: 6452662 (2002-09-01), Mulkens et al.

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