Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-10-02
2008-10-28
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S521000
Reexamination Certificate
active
07443514
ABSTRACT:
The present invention is directed to a system and method for using a spatial light modulator (SLM) to perform a null test of an (aspheric) optical surface. In an embodiment, such a system includes an interferometer, an optical element, and an SLM. The interferometer provides electromagnetic radiation. The optical element conditions the electromagnetic radiation to provide a first beam of radiation and a second beam of radiation. The SLM shapes a wavefront of the first beam of radiation resulting in a shaped wavefront corresponding to an optical surface. The shaped wavefront is incident on and conditioned by the optical surface. The shape of the optical surface is analyzed based on a fringe pattern resulting from interference between the shaped wavefront mapped by the optical surface and the second beam of radiation. The system may also include an optical design module that converts a null corrector design corresponding to the optical surface into instructions for the SLM.
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Harned Nora-Jean
Harned Robert D.
ASML Holding N.V.
Lyons Michael A
Sterne Kessler Goldstein & Fox P.L.L.C.
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