Diffractive lens and preparation method thereof

Details Diffractive lens and preparation method thereof Diffractive lens and preparation method thereof

1997-08-12

2000-04-25

Chang, Audrey

Optical: systems and elements

Diffraction

From grating

359566, 359571, 359575, 359742, 430 5, 430323, G02B 518, G02B 2744, G03F 900, G03C 500

Patent

active

060551070

ABSTRACT:
Method for the preparation of diffractive lens with one single etching step and using one single etching mask. While the widths and intervals of the masked areas of the photo masks are decided under a geometric relation, an etching mask can be prepared on the substrate of the lens where the widths and the intervals of the masked areas can be determined. As the included angle between the etching mask and the plan of the material of the lens is in a certain ratio to the etching efficiency of the etchant to the substrate of the lens, a one step etching process can be developed whereby multilevel diffractive lens with required number, widths and heights of the levels can be obtained. This invention also provides an oxidation-isotropic etching process on the diffractive lens so prepared.

REFERENCES:
patent: 4846552 (1989-07-01), Veldkamp et al.
patent: 5161059 (1992-11-01), Swanson et al.
patent: 5402435 (1995-03-01), Shiono et al.
patent: 5705321 (1998-01-01), Brueck et al.

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