Diffraction photoelectric displacement measuring device

Details Diffraction photoelectric displacement measuring device Diffraction photoelectric displacement measuring device

1987-07-24

1990-07-03

McGraw, Vincent P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, 350 9612, G01B 902

Patent

active

049385950

ABSTRACT:
The invention relates to an interferometric displacement measuring device in which the reference norm is a diffraction grid (G). Diffracted partial beam bundles (+m, -m) are fed into a coupler (TBJ) by means of coupling grids (+HG, -HG) via beam waveguides (+LWL, -LWL) and there brought into interference. The interfering partial beam bundles are transmitted from the outputs (+A, A, -A) via beam waveguides (+LWL, LWL, -LWL) to detectors (+D, D, -D) which convert them into electric signals out-of-phase with each other. The displacement of the diffraction grid (G) is a standard for measuring the changes in position of machine components which are movable relative to one another.

REFERENCES:
patent: 3900264 (1985-08-01), Heitmann et al.
patent: 4286838 (1981-09-01), Huignard et al.
patent: 4629886 (1986-12-01), Akiyama et al.
3.times.2 Channel Waveguide Gyroscope Couplers: Theory, IEEE Journal of Quantum Electronics, vol. QE-18, No. 10, Oct. 1982.
"Theory of Prism-Firm Coupler and Thin-Film Light Guides", J. Optical Soc. of America, vol. 60, (1970), pp. 1325-1337, Tien, et al.

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