Diffraction optical element and transfer mold therefor

Details Diffraction optical element and transfer mold therefor Diffraction optical element and transfer mold therefor

2005-09-06

2005-09-06

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S569000, C359S566000, C359S576000, C359S900000

Reexamination Certificate

active

06940650

ABSTRACT:
A diffraction optical element including an element body having a large number of grooves formed on its surface to form a grating, and a grating shape adjusting layer deposited on a grating surface of the element body by oblique incidence or material particles onto the grating surface, wherein the grating shape adjusting layer per se is made of a reflecting film material. By the grating shape adjusting layer, the contour shape of the resulting grating surface in a section perpendicular to a lengthwise direction of the grooves is made not similar to the sectional shape of the element body. A reflecting film may be formed on a grating shape adjusting layer made of another material. A reflecting film may be provided on the element body before a grating shape adjusting layer made of a transparent dielectric material is provided on the reflecting film.

REFERENCES:
patent: 6608722 (2003-08-01), Cowan et al.
patent: 6641985 (2003-11-01), Unno et al.
patent: 6736999 (2004-05-01), Nakabayashi
patent: 2001/0050815 (2001-12-01), Ishihara et al.
patent: 2003/0058538 (2003-03-01), Sugiyama et al.
patent: 2003/0197941 (2003-10-01), Ohgane
U.S. Appl. No. 60/222,182.

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