Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1996-04-12
1998-02-17
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, G01B 902
Patent
active
057196761
ABSTRACT:
Test surfaces are measured at grazing incidence with an interferometer using diffractive optics for manipulating reference and test beams. A leading diffractive optic separates the reference and test beams, and a following diffractive optic recombines the beams after the test beam is reflected from the test surface. Extraneous light, including light from other orders of diffraction, is isolated and blocked from combining with test and reference wavefronts.
REFERENCES:
patent: 3907438 (1975-09-01), Holeman
patent: 4391526 (1983-07-01), McLaughlin
patent: 4436424 (1984-03-01), Bunkenburg
patent: 4606640 (1986-08-01), Hirst
patent: 4653922 (1987-03-01), Jarisch et al.
patent: 4678333 (1987-07-01), Anderson
patent: 4791584 (1988-12-01), Greivenkamp, Jr.
patent: 4898470 (1990-02-01), Cleaveland
patent: 5041726 (1991-08-01), Chang et al.
patent: 5210591 (1993-05-01), De Groot
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5249032 (1993-09-01), Matsui et al.
patent: 5268742 (1993-12-01), Magner
"Grazing Incidence Interferometry Applied to the Measurement of Cylindrical Surfaces" by Thomas Dresel et al., Optical Engineering, vol. 34, No. 12, Dec. 1995, pp. 3531-3535.
"Holographically Observed Torsion in a Cylindrical Shaft" by A.D. Wilson, Applied Optics, vol.9 No. 9, Sep. 1970, pp. 2093-2097.
"Oblique Incidence Interferometry Applied to Non-Optical Surfaces" by K.G. Birch, Journal of Physics E. Scientific Instruments, 1973, vol. 6, Great Britain, pp. 1045-1048.
"Measurement of Deformation in a Cylindrical Shell by Holographic Interferometry" by T. Matsumoto, K. Iwata, and R. Nagata; Applied Optics, vol. 13, No.5, May. 1974, pp. 1080-1084.
"Zone Plate Interferometer"by Raymond N. Smart, May. 1974, vol.13, No.5, Applied Optics, pp. 1093-1099.
"Improved Oblique --Incidence Interferometer" by P. Hariharan, Optical Engineering, vol. 14, No. 3, May-Jun. 1975, pp. 257-258.
"Holographic Interferometer to Test Optical Surfaces" by Fernando Broder-Bursztyn and Daniel Malacara-Hernandez, Applied Optics, vol. 14, No. 9, Sep. 1975, pp. 2280-2282.
"Interferometric Surface Mapping with Variable Sensitivity" by W. Jaerisch and G. Makosch, Applied Optics, vol. 17, No. 5, 1 Mar. 1978, pp. 740-743.
"Interferometric Construction of Circular Gratings" by E. Leith, H. Chen, G. Collins, K. Scholten, G. Swanson, and J. Upatnieks, Applied Optics, vol. 19, No. 21,1 Nov. 1980, pp. 3626-3630.
"Optical Figure Characterization for Cylindrical Mirrors and Lenses" by Alvin D. Schnurr and Allen Mann, Optical Engineering, vol. 20, No. 3, May/Jun. 1981, pp. 412-416.
"Cylindrical lenses: Testing and Radius of Curvature Measurement" by R. Diaz-Uribe, J. Pedraza-Contreras, O. Cardona-Nunez, A. Cordero-Davila, and A. Cornejo Rodriquez, Applied Optics, vol. 25, No. 10, 15 May. 1986, pp. 1707-1709.
"Testing Cylindrical Lenses" by Joseph M. Geary, Optical Engineering, vol. 26, No. 12, Dec. 1987, pp. 1219-1224.
"Data Analysis in Fiber Optic Testing of Cylindrical Optics" by Joseph M. Geary, Optical Engineering, Mar. 1989, vol. 28, No. 3 pp. 212-216.
"Interferometry on Wolter X-Ray Optics: A Possible Approach" by Joseph M. Geary, Optical Engineering, vol. 28, No. 3, Mar. 1989, pp. 217-221.
"Constant Radial Shearing Interferometry with Circular Gratings" by Qing-Shin Ru, Nagaaki Ohyama, Toshio Honda, and Jumpei Tsujiuchi, Applied Optics, vol. 28, No. 15, 15 Aug. 1989, pp. 3350-3353.
"Profile Measurement of an Aspheric Cylindrical surface from Retroreflection" Ding-tin Lin and Der-Shen Wan, Applied Optics, vol. 30, No. 22, 1 Aug. 1991, pp. 3200-3204.
"Profile Measurements of Cylindrical Surfaces" by Der-Shen Wan and Ding-tin Lin, Applied, Optics, vol. 32, No. 7, 1 Mar. 1993, pp. 1060-1064.
"Determination of Two-Dimensional Planar Displacement by Moire Fringes of Concentric-Circle Gratings" by Yoon-Chang Park and Seung-Woo Kim, Applied Optics, vol. 33, No. 22, 1 Aug. 1994, pp. 5171-5176.
"Grating Interferometer for Flatness Testing" by Peter J. de Groot, Optics Letters, vol. 21, No.3, Feb. 1, 1996, pp. 228-230.
Kulawiec Andrew W.
Michaloski Paul F.
Tropel Corporation
Turner Samuel A.
LandOfFree
Diffraction management for grazing incidence interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Diffraction management for grazing incidence interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diffraction management for grazing incidence interferometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1788206