Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Patent
1995-12-11
1997-10-07
Lee, John D.
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
359566, 385 37, 430290, G02B 6124
Patent
active
056756917
ABSTRACT:
A diffraction grating structure for coupling light into or out of a high refractive index waveguide layer on a carrier substrate is formed by irradiating the carrier substrate and/or the layer with UV laser light that is subject to simultaneous, spatially periodic intensity modulation. The modulation may be achieved, for example, by a biprism. The modulated UV light has the effect of periodically modulating the local refractive index of the waveguide layer or of the surface of the substrate to form the diffraction grating.
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Epitaxial Growth of Bi.sub.12 GeO.sub.20 Thin-Film Optical Waveguides Using Excimer Laser Ablation, K. E. Youden et al., Appl. Phys. Lett 59 (16), 14 Oct. 1991, pp. 1929-1931.
Edlinger Johannes
Rudigier Helmut
Balzers Aktiengesellschaft
Lee John D.
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