Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1985-01-28
1987-04-07
LaRoche, Eugene R.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
250548, 356356, G01B 1102, G01N 2186
Patent
active
046563474
ABSTRACT:
A method of adjusting a relative positional relationship between two objects uses a diffraction grating. A first diffraction grating is arranged on a first object located to oppose a second object, a reflecting surface is arranged at a position of the second object which corresponds to the first diffraction grating, and the method includes the step of irradiating the first diffraction grating with a radiation beam of coherent light or quasi-monochromatic light and measuring/setting the gap between the first and second objects in accordance with a change in intensity of one of the diffracted light components from the first diffraction grating.
REFERENCES:
patent: 4188124 (1980-02-01), Jaerisch et al.
patent: 4200395 (1980-04-01), Smith et al.
Austin, S. et al, "Alignment of X-Ray Lithography Masks Using A New Interferometric Technique-Experemental Results", J. Vac. Sci. Technol., vol. 15, No. 3, May/Jun. '78, pp. 984-986.
"A Step-and-Repeat X-Ray Lithography System SR-1 1. System Design" by H. Kinoshita et al., Bull. Japan Soc. of Prec. Engg., pp. 195-196, vol. 16, No. 3 (Sep. 1982).
"A Step-and-Repeat X-Ray Lithography System SR-1 2. Alignment System" by E. Kawaguchi et al., Bull. Japan Soc. of Prec. Engg., pp. 197-198, vol. 16, No. 3 (Sep. 1982).
"A Step-and-Repeat X-Ray Lithography System SR-1 3. Positioning Mechanism System" by K. Deguchi et al., Bull. Japan Soc. of Prec. Engg., pp. 199-200, vol. 16, No. 3 (Sep. 1982).
"Step-and-Repeat Water Imaging" by S. Wittekoek, pp. 80-84, Jun. 1980, Solid State Technology.
"Experimental evaluation of interferometric alignment techniques for multiple mask registration" by T. M. Lyszczarz et al. pp. 1214-1218, J. Vac. Sci. Technol., Nov./Dec. 1981.
Deguchi Kimiyoshi
Iki Makoto
Takeuchi Nobuyuki
Une Atsunobu
LaRoche Eugene R.
Mis David
Nippon Telegraph & Telephone Public Corporation
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