Diffraction grating, method of making and method of using

Optical: systems and elements – Diffraction – Using fourier transform spatial filtering

Reexamination Certificate

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C359S569000, C359S572000, C359S573000

Reexamination Certificate

active

06894836

ABSTRACT:
A diffraction grating device operable as a reflection or transmission grating, and a method of manufacturing and using any number of such grating devices so that each device is individually electrically addressable to diffract radiation of different wavelengths. The grating device comprises first and second sets of interdigitated elements so that each element of the first set defines an element pair with an immediately adjacent element of the second set, a first gap is defined between the elements of each element pair, and a second gap is defined between each adjacent pair of element pairs. The elements of an element pair are selectively movable toward and away from each other. As such, the widths of the gaps can be selectively sized to diffract radiation of a desired wavelength.

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patent: 6356854 (2002-03-01), Schubert et al.
Structure for Realizing Unequal Capacitive Gaps While Holding Trench Widths Constant, Research Disclosure No. 439065 (Nov. 2000), p. 1942.

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