Diffraction grating having high throughput efficiency

Optical: systems and elements – Diffraction – From grating

Reexamination Certificate

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C359S576000

Reexamination Certificate

active

07139128

ABSTRACT:
A reflective diffraction grating having grooves and ridges and providing high throughput efficiency in the minus-first diffraction order. All but the zeroth diffraction order and the minus-first diffraction order may be prevented from existence by directing the radiation onto the grating at an appropriate angle. The radiation having a TM polarization is eliminated from the zeroth order by destructive interference by appropriate selection of a the groove width of the grating, and radiation having a TE polarization is eliminated from the zeroth order by destructive interference by depositing an overcoat of an appropriate thickness. A dielectric material may be deposited in the grooves.

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Moharam M G et al., “Rigorous Coupled-Wave Analysis of Metallic Surface-Relief Gratings”, Journal of The Optical Society of America-A, Optical Society of America, Washington, US, vol. 3, No. 11, Nov. 1, 1986, pp. 1780-1787, XP000616808, ISSN.
Roumiguieres J L et al., “On the Efficiencies of Rectangular-Groove Gratings”, Journal of the Optical Society of America, American Institute of Physics. New York, US, vol. 66, No. 8, Aug. 1976, pp. 772-775, XP002963365.

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