Diffraction grating

Details Diffraction grating Diffraction grating

1993-05-24

1994-11-08

Lerner, Martin

Optical: systems and elements

Diffraction

From grating

359569, 378 70, 378 73, G02B 518, G02B 2744

Patent

active

053632389

ABSTRACT:
The present invention discloses diffraction gratings which do not generate any thermal strain and can perform extremely high-precision and high-efficiency diffraction nearly free from scattered beams. The diffraction gratings are built by allowing the chemically deposited film of silicon carbide whose crystal planes are strongly oriented to the (220) planes in terms of Miller indices to form on the substrate comprising sintered silicon carbide, polishing the surface of the deposited film to 5 .ANG. RMS or less, and directly etched laminar-type grating grooves on that surface by using ion-beam etching.

REFERENCES:
patent: 3873824 (1975-03-01), Bean et al.
patent: 4451544 (1984-05-01), Kawabuchi
patent: 4608326 (1986-08-01), Neukermans et al.
patent: 5005075 (1991-04-01), Kobayashi et al.
patent: 5052033 (1991-09-01), Ikeda et al.
patent: 5166962 (1992-11-01), Murooka et al.
patent: 5178977 (1993-01-01), Yamada et al.
patent: 5234537 (1993-08-01), Nagano et al.
patent: 5247557 (1993-09-01), Ikeda

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