Differentiating mass spectrometer

Details Differentiating mass spectrometer Differentiating mass spectrometer

1995-11-15

1997-04-08

Berman, Jack I.

Radiant energy

Ionic separation or analysis

Ion beam pulsing means with detector synchronizing means

250286, 250309, H01J 3726

Patent

active

056190344

ABSTRACT:
A Time of Flight Mass Spectrometer which features rastering the secondary beam on the surface and analyzing composition at each of the rastered locations thereby greatly increasing the rate of data throughput. The primary beam is rastered on the target surface and the secondary beam is rastered on the detector surface. The latter arrangement provides ways of interpreting data including mapping the distribution of selected species on the target surface. The secondary beam is generated from a gas. This latter arrangement is especially useful for studying reaction rams of mixtures of reactive gases.

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