Differentially pumped temperature controller for low pressure th

Details Differentially pumped temperature controller for low pressure th Differentially pumped temperature controller for low pressure th

1992-10-06

1994-08-30

Reynolds, Bruce A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392418, 118725, 427592, C23C 1400, H05B 300

Patent

active

053430123

ABSTRACT:
The temperature of a substrate on which a thin film structure is to be fabricated in a low pressure environment is controlled by supporting the substrate on a heater block having a rim which defines first and second regions between the substrate and the heater block. The first region is inside the rim. The second region is outside the rim, surrounding the first region. Heat is applied to the heater block and an inert gas having good thermal conductivity is pumped through the block into the first region at a first controlled pressure. Gas is pumped away from the second region at a second pressure substantially less than the first pressure. A pressure differential is thus maintained between the two regions. This prevents the inert gas from contaminating the thin film fabrication environment by escaping past the substrate into the fabrication environment.

REFERENCES:
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patent: 4542298 (1985-09-01), Holden
patent: 4603466 (1986-08-01), Morley
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patent: 5238499 (1993-08-01), van de Ven et al.
Research Disclosure 321105, Jan. 10, 1991 (anonymous).
High Temperature Resistive Substrate Heater, undated advertising brochure of US Inc.

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