Radiant energy – Luminophor irradiation
Reexamination Certificate
2006-06-28
2008-11-04
Porta, Davd P (Department: 2884)
Radiant energy
Luminophor irradiation
C250S459100
Reexamination Certificate
active
07446321
ABSTRACT:
A method for using photoluminescence to identify defects in a sub-surface region of a sample includes performing a first probe of the sample. A first data set, based on the first probe, is produced indicating defects located primarily in a surface layer of the sample. A second data set, based on a second probe, is produced indicating defects located in both the surface layer and a sub-surface region of the sample. The first data set is subtracted from the second data set to produce a third data set indicating defects located primarily in the sub-surface region of the sample. The first data set may optionally be normalized relative to the second data set before performing the subtraction. The first and second probes may advantageously be performed using a first laser and a second laser, respectively, having different wavelengths from each other.
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Office
Buczkowski Andrzej
Hummel Steven G.
Laurent Nicolas
Shachaf Amit
Walker Tom
Halbert Michael J.
Nanometrics Incorporated
Porta Davd P
Silicon Valley Patent & Group LLP
Vu Mindy
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