Differential virtual ground beam blanker

Details Differential virtual ground beam blanker Differential virtual ground beam blanker

1993-02-26

1995-05-02

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

2505051, H01J 37147, H01J 3709

Patent

active

054122180

ABSTRACT:
Spurious electrodynamic effects are reduced or eliminated by the use of a mechanically compact, low capacitance, geometrically symmetric, differentially-driven blanker assembly. This eliminates the need for internal cables or SMA-type launchers and has a solid metal electromechanical contact to system ground.

REFERENCES:
patent: 4367411 (1983-01-01), Hanley
patent: 4434371 (1984-02-01), Knauer
patent: 4445041 (1984-04-01), Kelly et al.
Mark Gesley & Pat Condran "Electron Beam Blanker Optics" J. Vac. Sci Technol. B 8(6), Nov./Dec. 1990.
M. G. R. Thomson et al. "The EBES4 electron-beam column" J. Vac Sci. Technol. B, vol. 5, No. 1, Jan./Feb. 1987.

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