Differential thermal analysis sensor

Details Differential thermal analysis sensor Differential thermal analysis sensor

1998-12-31

2001-05-29

Bennett, G. Bradley (Department: 2859)

Thermal measuring and testing

Differential thermal analysis

C374S011000, C374S012000, C374S013000, C374S014000, C374S178000, C374S179000, C438S014000, C438S023000, C438S054000

Reexamination Certificate

active

06238085

ABSTRACT:

BACKGROUND
The present invention pertains to gas and environmental chemical sensors. Particularly, the invention pertains to micromachined integrated chips utilizing heat and thermal transfer characteristics of the gas or substance around an element of the sensor to obtain chemical information about that which is being detected.
SUMMARY OF THE INVENTION
In a thermal modulation technique for sensing, a thermal pulse of an arbitrary shape is applied to the sensor system, and changes in the temperature of the sensing membrane or active material exposed to the environment are monitored as the heat pulse from the active material interacts with the surrounding environment. The thermal pulse is also applied to an active material that is shielded from the environment. Thermocouple junctions proximate to both active materials provide a differential temperature indication between the two materials. The growth and subsequent decay of the heat pulse indicated by differential temperature reflects time dependent changes in the heat transfer characteristics in the gas phase surrounding the sensor. Relevant chemical information is obtained by interpreting the temperature changes of the sensor surface during this dynamic interaction. The power of this detection approach comes from integrating an array of thermally modulated sensors, and combining the selectivity of multiple sorbent phases with the kinetic selectivity of each modulated device. This technique is made possible by the high sensitivity and low thermal mass of silicon-based integrated microcalorimeters.


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