Differential pressure transducer wherein a bridge connects two p

Details Differential pressure transducer wherein a bridge connects two p Differential pressure transducer wherein a bridge connects two p

1994-08-16

1996-10-29

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Vibration type

73716, 73705, G01L 1100, G01L 1302

Patent

active

055698565

ABSTRACT:
A differential pressure transducer is provided in which first and second diaphragms are formed within a block of material, such as monocrystalline silicon. Each diaphragm carries a support for a bridge. The supports are offset from the center of the diaphragms such that deflection of the diaphragms imparts a degree of lateral motion to the respective support. The bridge is held within an evacuated cavity and the resonant frequency of the bridge is a function of the difference in pressure action of the diaphragms.

REFERENCES:
patent: 4790192 (1988-12-01), Knecht et al.
patent: 4813271 (1989-03-01), Greenwood
patent: 4831304 (1989-05-01), Dorey et al.
patent: 4884450 (1989-12-01), Greenwood et al.
patent: 5022270 (1991-06-01), Rud, Jr.
patent: 5029479 (1991-07-01), Bryan
patent: 5105665 (1992-04-01), Parsons et al.
patent: 5152173 (1992-10-01), Willson
patent: 5195374 (1993-03-01), Parsons et al.
"Micromechanical resonant sensors," Journal A, vol. 32, No. 3 (Oct. 1991), pp. 15-22.

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