Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1980-06-30
1982-06-22
Woodiel, Donald O.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
73718, G01L 912
Patent
active
043365671
ABSTRACT:
A differential pressure transducer having a central support structure separating two flexible diaphragms. The support structure has a central hole and the diaphragms are joined on their opposing surfaces at their respective centers by a post that is loosely received through the hole. The central structure and each diaphragm are separated by an annular sealing ring that is preferably fabricated from a glass frit having characteristics similar to the material used for the diaphragms and central structure. The transducer further includes a plurality of electrodes located on one surface of the central support member and a third electrode, located on the inner surface of one of the diaphragms, therein forming the electrodes of a pressure sensing capacitor and a reference capacitor. The transducer further includes a fourth electrode located on the inner surface of the opposing diaphragm wherein the fourth electrode is electrically connected to the third electrode to provide a means for shielding capacitive measurements from stray magnetic and electrical fields.
REFERENCES:
patent: 4177680 (1979-12-01), Coleman
patent: 4178621 (1979-12-01), Simonelic et al.
patent: 4196632 (1980-04-01), Sikorra
patent: 4244228 (1981-01-01), Lehnhardt
patent: 4288835 (1981-09-01), Lee et al.
Cuoco Anthony F.
Seitzman Markell
The Bendix Corporation
Woodiel Donald O.
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