Differential pressure sensor capable of removing influence of st

Details Differential pressure sensor capable of removing influence of st Differential pressure sensor capable of removing influence of st

1992-12-04

1995-05-09

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73727, 338 4, G01L 906

Patent

active

054129923

ABSTRACT:
A differential pressure sensor is disclosed, and in particular, there is disclosed a multiple function type differential pressure sensor capable of reducing a zero-point-change and a span change of means for detecting a differential pressure when applying a static pressure and being readily manufactured at high accuracy. The multiple function type differential pressure sensor is constructed by a semiconductor chip 1 for detecting a differential pressure, a fixing base 2 which has a joining part 21 joined to a thick part of the semiconductor chip 1 and which has a thickness less than or equal to that of the semiconductor chip 1, and also which has at least one thin part 22 in an outer periphery other than the joining part 21, and a housing 4 joined to the fixing base.

REFERENCES:
patent: 4276533 (1981-06-01), Tominaga et al.
patent: 4528855 (1985-07-01), Singh
patent: 4658651 (1987-04-01), Le
patent: 4765188 (1988-08-01), Krechmery et al.
patent: 4993265 (1991-02-01), Koen et al.
patent: 5193394 (1993-03-01), Suda

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