Differential pressure sensor

Details Differential pressure sensor Differential pressure sensor

2006-03-14

2006-03-14

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S719000, C073S721000

Reexamination Certificate

active

07010984

ABSTRACT:
The differential pressure sensor is formed of a semiconductor substrate (1) which is thinned out in an inner region into a membrane (2) which may be impinged by pressure on both sides. Measurement resistances (3ato3d) for detecting the differential pressure (P1minus P2) are formed within the membrane (2), and compensation resistances (4) are formed on the carrier, which are connected to measurement resistances (3). The measurement resistances (3) are connected into a first measurement bridge (6) and the compensation resistances (4ato4d) into a second measurement bridge (7).

REFERENCES:
patent: 4777826 (1988-10-01), Rud et al.
patent: 4790192 (1988-12-01), Knecht et al.
patent: 6234027 (2001-05-01), Schatz
patent: 6813954 (2004-11-01), Gokhfeld
patent: 2004/0079159 (2004-04-01), Muchow
patent: 197 01 055 (1998-07-01), None
patent: 0 083 496 (1983-07-01), None

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