Differential pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Details

C073S736000

Reexamination Certificate

active

07930943

ABSTRACT:
In order to reduce hysteresis and other noise components included in the output signal characteristic of a differential pressure sensor, an elastic reaction member which operates together with a diaphragm provided in a chamber of the differential pressure sensor includes a contact portion which contacts the diaphragm, and a plurality of springs which are arranged symmetrically about the contact portion. Each of the springs is a plate shaped or linear shaped spring which is bent into the form of a letter C, U, J, or V, and has one of its ends fixed to a wall which defines the chamber, while its other end is connected to the contact portion. When the contact portion shifts together with the diaphragm, the deformations of the plurality of springs are mutually balanced, so that rotation and horizontal deviation of the contact portion with respect to the diaphragm is suppressed.

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patent: 2000-082369 (2000-03-01), None
International Search Report mailed on Apr. 15, 2008 for the corresponding International patent application No. PCT/JP2008/050238 (English translation enclosed).

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