Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1977-06-15
1979-01-23
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
73706, 338 4, 338 42, G01L 906
Patent
active
041354087
ABSTRACT:
A differential pressure transducer assembly which indicates pressure differences while remaining insensitive to variations in line pressure and overload pressure. The assembly has a transducer consisting of a semi-conductor sensor isolated from the medium being measured by mounting it on a resilient diaphragm between two small hydraulic chambers. The chambers are closed with a pair of diaphragms which isolate the two chambers from the external environment. The transducer sensor is comprised of a silicon chip having a large center boss area which is supported by a silicon back plate of similar material fused to the silicon chip at the periphery. The back plate is mounted by a hollow support stud to a threaded hub at the center of the resilient diaphragm separating the chambers. A space between the silicon chip and back plate communicates with the hydraulic fluid of one chamber through an inlet in the support stud. The opposite side of the silicon chip is immersed in the hydraulic fluid of the other chamber. The large center boss area on the transducer chip acts as an overpressure limit stop to protect the assembly. In addition the diaphragms between the chambers and the external environment include valves for overpressure seal off.
REFERENCES:
patent: 3085437 (1963-04-01), Osterstrom
patent: 3140613 (1964-07-01), Hasegawa
patent: 3559488 (1971-02-01), Weaver
patent: 3618390 (1971-11-01), Frick
patent: 3656348 (1972-04-01), Bertrand
ICT Instruments, Inc.
Woodiel Donald O.
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