Differential pressure measuring transducer assembly

Details Differential pressure measuring transducer assembly Differential pressure measuring transducer assembly

1984-04-11

1986-02-18

Goldstein, Herbert

Measuring and testing

Fluid pressure gauge

Diaphragm

73726, 338 4, G01L 708

Patent

active

045704988

ABSTRACT:
A differential pressure measuring transducer assembly of semiconductor material including a pressure receiving section producing a displacement when pressure is applied, and a stationary section of large thickness located at an outer periphery of the pressure receiving section. The pressure receiving section is composed of a large thickness portion extending to the stationary section at the outer periphery, and a small thickness portion occupying the rest of the pressure receiving section, and a gauge resistance is provided to the large thickness portion.

REFERENCES:
patent: 2979680 (1984-04-01), Bean, Jr.
patent: 3213400 (1965-10-01), Gieb
patent: 3869906 (1975-03-01), Andersson
patent: 4141253 (1979-02-01), Whitehead
patent: 4321578 (1982-03-01), Nayasu et al.
patent: 4364276 (1982-12-01), Shimazoe et al.

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