Differential pressure measurement using backside sensing and...

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Reexamination Certificate

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07077008

ABSTRACT:
Differential pressure sensor systems and methods are disclosed, including an absolute pressure sensor composed of a plurality of pressure sense die for detecting sensed media, wherein each of the pressure sense die possess a back side and a front side and are respectively associated with a plurality of varying pressures. The sensed media are applied only at the backside of the pressure sense die, thereby preventing wire bonds and active regions associated with the front side of the pressure sense die from exposure to sensed media and attack from acids and abrasive chemicals associated with the sensed media.

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PCT - Notification of Transmittal of The International Search Report and The Written Opinion of the International Searching Authority, or the Declaration, Date of Mailing Jan. 16, 2006.

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