Differential plane mirror interferometer having beamsplitter/bea

Optics: measuring and testing – By particle light scattering – With photocell detection

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356351, G01B 902

Patent

active

048027642

ABSTRACT:
A differential plane mirror interferometer comprises a source (10) which emits a light beam containing two orthogonally polarized components of different frequencies; a source of a stabilized electrical reference signal (11) of a frequency corresponding to a difference frequency between the two components of the light beam; a beamsplitter/beam folder assembly (16, 16A) for converting the input beam into two separated, parallel, orthogonally polarized beams; a half-wave retardation plate (29A, 29) located in one of the separated beams to produce two separated parallel beams with the same polarization; means including a polarizing beamsplitter (44), for causing each of the separated parallel beams with the same polarization to be reflected twice by one of two plane mirrors (71, 70) to produce two parallel output beams with the same polarization; a half-wave retardation plate (29B, 29) located in one of the separated parallel output beams, with the beamsplitter/beam folder assembly (16, 16B) converting the two separated parallel orthogonally polarized output beams into a single output beam in which the phase difference between the two frequency components of the single output beam is directly proportional to the optical path length between the two plane mirrors (70, 71); a polarizer (81) for mixing the orthogonal components of the output beam; a photoelectric detector (83) to produce the measurement signal; and a phase/meter accumulator (90) to indicate the phase difference between the reference and measurement signals which is directly proportional to the changes in the optical path length between the two plane mirrors.

REFERENCES:
patent: 3656853 (1972-04-01), Bagley et al.
patent: 3788746 (1974-01-01), Baldwin et al.
patent: 4693605 (1987-09-01), Sommargren
"Double-Passed Michelson Interferometer", Bennett, Optics Communications, vol. 4, No. 6, 2-1972, 428-430.

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