Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1986-06-12
1987-09-15
Willis, Davis L.
Optics: measuring and testing
By particle light scattering
With photocell detection
356351, G01B 902
Patent
active
046936050
ABSTRACT:
A differential plane mirror interferometric comprises a source (10) which emits a light beam containing two linear orthogonally polarized components; a tilted parallel plate (16) having regions of reflection, antireflection and polarization coatings for converting the input beam into two separated, parallel, orthogonally polarized beams; a half-wave retardation plate (29A, 29) located in one of the separated beams for converting said two separated, parallel, orthogonally polarized beams into two separated parallel beams with the same polarization; means including a polarizing beamsplitter (44), for causing each of the separated parallel beams with the same polarization to be reflected twice by one of two plane mirrors (71, 70) to produce two parallel output beams with the same polarization; a half-wave retardation plate (29B, 29) located in one of the separated parallel output beams, with the tilted parallel plate (16) having regions of reflection, antireflection and polarization coatings for converting the two separated parallel orthogonally polarized output beams into a single output beam in which the phase difference between the two polarization components of the single output beam is directly proportional to the optical path length between the two plane mirrors (70, 71); a polarizer (81) for mixing the orthogonal components of the output beam; a photoelectric detector (83) to produce the measurement signal; and an electronic module (90) to indicate the phase difference which is directly proportional to the changes in the optical path length between the two plane mirrors.
REFERENCES:
patent: 3656853 (1972-04-01), Bagley et al.
"Double-Pass Michelson Interferometer", Bennett, Optics Communications, vol. 4, No. 6, 2-1972, 428-430.
Turner S. A.
Willis Davis L.
Zygo Corporation
LandOfFree
Differential plane mirror interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Differential plane mirror interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Differential plane mirror interferometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1381631