Differential planarization

Details Differential planarization Differential planarization

2006-09-12

2006-09-12

Baumeister, B. William (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S686000, C257S690000, C257S620000, C257S621000, C257S758000, C257SE21583, C257SE21580

Reexamination Certificate

active

07105925

ABSTRACT:
Method and structure for optimizing and controlling chemical mechanical planarization are disclosed. Embodiments of the invention include planarization techniques to make nonplanar surfaces comprising alternating metal and intermetal layers. Relative protrusion dimensions and uniformity of various layers may be accurately controlled using the disclosed techniques.

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International Search Report PCT/US 03/39192.

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