Differential-phase interferometric system

Details Differential-phase interferometric system Differential-phase interferometric system

2011-01-04

2011-01-04

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

Reexamination Certificate

active

07864332

ABSTRACT:
A differential-phase interferometric system includes a polarized heterodyne interferometer for generating reference and signal beam that travel along reference and signal channels, respectively. The signal beam is directed to a specimen and contains measured information of the specimen. The interferometer further generates a first electrical signal output corresponding to first linear polarized waves of the reference and signal beams, and a second electrical signal output corresponding to second linear polarized waves of the reference and signal beams. A differential amplifier receives the first and second electrical signal outputs, and generates a differential signal output therefrom. A data acquisition unit is used to measure amplitudes of the first and second electrical signal outputs and the differential signal output. A computing unit computes the amplitudes measured by the data acquisition unit to determine a phase difference between the electrical signal outputs, which corresponds to the measured information of the specimen.

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patent: 6934035 (2005-08-01), Yang et al.
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patent: 7339682 (2008-03-01), Aiyer et al.
patent: 7365858 (2008-04-01), Fang-Yen et al.

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