Differential phase contrast inspection system with multiple dete

Details Differential phase contrast inspection system with multiple dete Differential phase contrast inspection system with multiple dete

1995-09-19

1997-06-10

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 359370, G01B 902

Patent

active

056381751

ABSTRACT:
A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results. The systems makes use of a "black beam" at the optical axis of the system, and uses at least two detectors to determine the intensity of the light beam after passing through a work piece.

REFERENCES:
patent: 5459576 (1995-10-01), Brunfeld et al.

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